나노임프린팅머신(Nano Imprint Machine)

Item	Specifications ANT-6H
Curing Type	UV, Thermal, UV+Thermal
Stamp	Quartz, Si, Ni, PDMS, PMMA, PC, PUA, etc
Imprinting Conditions	Wafer : 1inch ~ 6 inch Imprinting Pressure : ≤ 2bar (UV), ≤60bar (TH) Single Layer / Single Step
Imprinting Head	Chip-size Multi-Head imprinting Unit
XZ Stage/Unit	X: LM 450mm Z: Sliding Unit 150mm
UV System	> 50mW/cm2
Temperature	RT ~ 250℃
Heating/Cooling V.	Heating: 20℃/m, Cooling: 15 ℃/m
Vacuum	> 10-2 Torr
Anti Vibration Unit	Cut-off : 1~1.5Hz
Controller	PLC (Touch Screen)
Dimension/Weight	860Wx700Dx1900H / 1Ton

Item	Specifications ANT-4
Curing Type	UV (Ultra-Violet)
Stamp	Quartz, Si, PFPE, PDMS, PC
Imprinting Conditions	Wafer : 1~4 inch Room Temperature Imprinting Pressure ≤ 2bar Single Layer / Single Step
Imprinting Head	Chip-size Multi-Head imprinting Unit Multiple Fixturing/Air Chucking
XYZ Stage	Stroke : 250 x 120 x 25mm Z Sliding Unit
UV System	40mW/cm2 (2Kw)
Anti Vibration System	Cut-off : 1~1.5Hz
Controller	UMAC-2